KLA

SFS 6420 Wafer

Metrology & Inspection 150mm KLA SFS family

Research Quality: 40% complete

The KLA SFS 6420 is a standalone wafer inspection system for non-patterned particle detection. The SFS 6420 uses an Algon laser source. The SFS 6420 is compatible with 150 mm and 200 mm wafers.^[1]^[2]

SFS 6420 Wafer — Inventory photo — Fig. 01SFS 6420 WaferInventory photo^[3]

Wafer size

150mm

Power

208V^[3]

Vacuum

4" diagram, 2 holes for system and laser^[1]

Optics

Algon Laser^[1]

What it is

The KLA SFS 6420 is a standalone wafer inspection system for non-patterned particle detection. The SFS 6420 is compatible with 150 mm and 200 mm wafers and uses an Algon laser source.^[1]^[2]

How it works

General reference — not yet source-verified

In laser-based particle inspection, a focused laser beam scans the wafer surface. Light scattered by particles or surface anomalies is collected by optics and converted into electrical signals to identify and map defect locations.

What do the numbers mean?

Power & electrical2

Voltage: 208V^[3]
Power: 208V, 1 phase, 50/60Hz^[1]

Vacuum & pumping3

Vacuum: ~-23inHg (Spec: >-20inHg / Quick connection)^[1]
External Exhaust: 4" diagram, 2 holes for system and laser^[1]
Vacuum: ~-23inHg (Spec: >-20inHg / Quick connection)^[1]

Wafer handling5

Wafer size: Non patterned wafer particle inspection, 150 mm & 200 mm compatible^[1]
Handler: 150 mm & 200 mm Single Open, puck type^[1]
Wafer size: 150 mm & 200 mm compatible^[1]
Inspection type: Non patterned wafer particle inspection^[1]
Wafer size compatibility: 150 mm & 200 mm compatible^[1]

Optics & imaging2

Source: Algon Laser^[1]
Light source: Algon Laser^[1]

Control & software3

STANDARD SOFTWARE VERSIONS:^[1]
System Software: 4.2^[1]
System software version: 4.2^[1]

Dimensions & facilities1

POWER AND FACILITIES:^[1]

Accurate?

Configuration & options6

Phase: 1 Phase^[3]
Frequency: 60Hz^[3]; MAIN BODY:^[1]
Install Type: stand-alone^[1]
OS Version: Windows 98^[1]
Frequency: 50/60Hz^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208V^[3]
Power208V, 1 phase, 50/60Hz^[1]
Vacuum~-23inHg (Spec: >-20inHg / Quick connection)^[1]
External Exhaust4" diagram, 2 holes for system and laser^[1]
Vacuum~-23inHg (Spec: >-20inHg / Quick connection)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the SFS 6420 support?

The SFS 6420 supports 150 mm and 200 mm wafers.^[1]^[2]

What type of light source does the SFS 6420 use?

The SFS 6420 uses an Algon laser source.^[1]^[2]

What are the power requirements for the SFS 6420?

The SFS 6420 requires 208 V, single phase, 50/60 Hz power.^[1]^[2]

What vacuum and exhaust connections are needed?

The system requires vacuum at approximately -23 inHg (specified >-20 inHg) with a quick-connection fitting, and a 4-inch exhaust diagram with two holes for the system and laser.^[1]^[2]

What software does the SFS 6420 run?

The system runs Windows 98 as the operating system and system software version 4.2.^[1]^[2]

Not publicly documented

The following facts about the SFS 6420 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SFS 6420 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SFS 6420 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SFS 6420 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SFS 6420 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SFS 6420 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report