KLA SFS

Models in this family

1. 

   SFS 6100 Wafer Surface Analysis

   The KLA SFS 6100 is a non-patterned wafer inspection system that uses a laser-scattering technique to detect surface defects on bare or process wafers.

2. 

   SFS 6220 Wafer
3. 

   SFS 6420 Wafer

   The KLA SFS 6420 is a wafer inspection system for non-patterned particle detection, compatible with 150 mm and 200 mm wafers, using an Algon laser source.