Waferpedia

KLA

.496 PSL Wafer

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KLA.496 PSL Wafer
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What it is

The KLA .496 PSL Wafer is an 8-inch reference wafer manufactured by KLA Corporation. The wafer is a NIST-traceable standard designed for calibration of particle detection systems.[1][2]

How it works

General reference — not yet source-verified

A particle counter or inspection tool uses a laser beam and photodetector system to capture scattered light from surface defects or particles. By comparing the measured scatter intensity from the PSL spheres to the known size, the system's gain, laser power, and data analysis parameters can be adjusted to meet specification. The wafer is typically measured at multiple sites to ensure uniform performance across the entire scan field.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Configuration & options5

NIST Traceable[1]
Accurate?
Capable on Surfscan 6xy0 and Sp1[1]
Accurate?
Traceability
NIST Traceable[1]
Accurate?
Compatible systems
Capable on Surfscan 6xy0 and SP1[1]
Accurate?
Category
Metrology & Inspection[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the wafer size of the KLA .496 PSL Wafer?

The KLA .496 PSL Wafer is an 8-inch wafer.[1][2]

Is the KLA .496 PSL Wafer NIST traceable?

Yes, it is NIST traceable.[1][2]

What is the model designation of this reference wafer?

The model designation is .496 PSL Wafer.[1][2]

Not publicly documented

The following facts about the .496 PSL Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the .496 PSL Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the .496 PSL Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the .496 PSL Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the .496 PSL Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the .496 PSL Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Sep 25, 2026.

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