Comparison ledger
Filmetrics F50, KLA SFS 6420 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | F50Filmetrics | |
|---|---|---|
| OEM | Filmetrics | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics F50 | KLA SFS |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | Filmetrics[2] | — |
| Model | F50-UV[2] | — |
| Tool Type | Inspection, Test and Characterization[2] | — |
| Description | Thin-Film Reflectometry[2] | — |
| Reflection spectrum range | 190-1100 nm[2] | — |
| Light sources | Deuterium (UV) and Halogen (Vis-nIR)[2] | — |
| Thickness / optical constants range | 10 Å to 150 µm thickness, n, and k measurements[2] | — |
| Wafer mapping size | Motorized mapping on wafers up to 150 mm[2] | — |
| Small substrate size | ≥ 2-3 mm[2] | — |
| Measurement spot size | Approx. 1-2 mm[2] | — |
| Measurement capability | Can model up to three layers with accuracy[2] | — |
| Measurement modes | Motorized wafer-mapping or non-motorized single-spot measurements[2] | — |
| Maximum sample size | Samples as large as 300 mm in diameter[1] | — |
| Stage type | Motorized R-Theta stage[1] | — |
| Mapping speed | As quickly as two points per second[1] | — |
| Computer interface | USB port connection to a Windows computer[1] | — |
| Wavelength range (F50-UV variant) | 190-1100 nm[2] | — |
| Light source | Deuterium (UV) and Halogen (Vis-nIR)[2] | Algon Laser[4] |
| Thickness measurement range | 10 Å to 150 µm (n and k also measured)[2] | — |
| Mapping capability | Motorized mapping on wafers up to 150mm[2] | — |
| Layer modeling | Up to three layers[2] | — |
| Form factor | Tabletop, connects via USB[1] | — |
| Software | FILMeasure 5.0[1] | — |
| Reflection spectrum | 190-1100 nm[2] | — |
| Measurement mode | Motorized mapping or non-motorized single-spot measurements[2] | — |
| Phase | — | 1 Phase[3] |
| Frequency | — | 60Hz[3] |
| Voltage | — | 208V[3] |
| Configuration | — | MAIN BODY:[4] |
| Wafer size | — | Non patterned wafer particle inspection, 150 mm & 200 mm compatible[4] |
| Install Type | — | stand-alone[4] |
| Source | — | Algon Laser[4] |
| Handler | — | 150 mm & 200 mm Single Open, puck type[4] |
| OS Version | — | Windows 98[4] |
| System Software | — | 4.2[4] |
| Power | — | 208V, 1 phase, 50/60Hz[4] |
| Vacuum | — | ~-23inHg (Spec: >-20inHg / Quick connection)[4] |
| External Exhaust | — | 4" diagram, 2 holes for system and laser[4] |
| Inspection type | — | Non patterned wafer particle inspection[4] |
| Wafer size compatibility | — | 150 mm & 200 mm compatible[4] |
| System software version | — | 4.2[4] |
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