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Zeiss

Supra 55 VP

Metrology & InspectionZeiss Supra 55 family
Research Quality: 70% complete

The Zeiss Supra 55 VP is a high-resolution field emission scanning electron microscope. The Zeiss Supra 55 VP operates in high vacuum and variable pressure modes. The Zeiss Supra 55 VP has a field emission cathode.[1][2][3]

Supra 55 VP — Inventory photo
Fig. 01Supra 55 VPInventory photo[4]

Power

100 V to 30 kV[2]

Vacuum

Variable pressure[4]

Optics

Inlens Detector[4]

What it is

The Zeiss Supra 55 VP is a scanning electron microscope for high-resolution inspection and metrology.[4][1][2][3]

The Zeiss Supra 55 VP is a field-emission SEM with variable-pressure capability.[1][2][3][5]

How it works

General reference — not yet source-verified

A scanning electron microscope forms images by scanning a focused electron beam across a specimen and detecting emitted signals from the surface and near-surface region.

Variable-pressure operation allows imaging of less conductive or moist specimens with reduced need for conductive coating.

Where it fits in the process flow

The variable-pressure mode supports examination of nonconductive or lightly conductive specimens, which broadens the range of samples that can be evaluated without extensive sample preparation.[2][3][1]

Applications

The Zeiss Supra 55 VP is used for high-resolution surface examination.[5][1][2][3]

The Zeiss Supra 55 VP is used for examining nanostructures.[2]

What do the numbers mean?

Power & electrical1

Accelerating voltage range
100 V to 30 kV[2]
Accurate?

Vacuum & pumping5

Variable pressure[4]
Accurate?
Primary pump
turbo[4]
Accurate?
Operating modes
High vacuum and variable pressure[1]
Accurate?
Variable pressure range
2 to 133 Pa[1]
Accurate?
Variable pressure range
2 to 133 Pa, adjustable in 1 Pa steps[2]
Accurate?

Optics & imaging9

Everheart Thronley Secondary Electron Detector[4]
Accurate?
Inlens Detector[4]
Accurate?
Magnification
12 to 900,000x[1]
Accurate?
Electron image resolution
1.0 nm at 15 kV; 1.7 nm at 1 kV; 3.5 nm at 0.2 kV; 2.0 nm at 30 kV in VP mode[1]
Accurate?
Detectors
In-lens detector, Everhart-Thornley detector, secondary detector, VP-SE detector, and 4-quadrant backscattered electron detector[2]
Accurate?
Accessories
EDS detector, EBSD[1]
Accurate?
Accessories
Energy dispersive x-ray spectrometer, Nanometer Pattern Generation System, in-lens SE, Everhart-Thornley SE, VPSE, Robinson BSE, STEM[5]
Accurate?
Secondary electron detector
Everhart-Thornley secondary electron detector[4]
Accurate?
In-lens detector
Present[4]
Accurate?

Control & software2

Software
SmartSEM (v6)[4]
Accurate?
Control system OS
Windows 10[4]
Accurate?

Configuration & options7

Windows OS
W10[4]
Accurate?
Source Type
TFE[4]
Accurate?
Instrument type
Field emission scanning electron microscope (FE-SEM)[1]
Accurate?
Field emission cathode
Present[2]
Accurate?
Sample stage
5-axes motorized Cartesian sample stage[1]
Accurate?
Probe current
4 pA to 10 nA[1]
Accurate?
Probe current optional upper limit
20 nA optional[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationVariable pressure[4]
  • Primary pumpturbo[4]
  • Operating modesHigh vacuum and variable pressure[1]
  • Accelerating voltage range100 V to 30 kV[2]
  • Variable pressure range2 to 133 Pa[1]
  • Variable pressure range2 to 133 Pa, adjustable in 1 Pa steps[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What operating modes are available on the Zeiss Supra 55 VP?

The Zeiss Supra 55 VP operates in high-vacuum mode and variable-pressure mode.[1][2][3][5]

Not publicly documented

The following facts about the Supra 55 VP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Supra 55 VP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Supra 55 VP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Supra 55 VP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Supra 55 VP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Supra 55 VP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]binghamton.edu — binghamton.edubinghamton.edu
  2. [2]tuhh.de — tuhh.detuhh.de
  3. [3]SEM Zeiss SUPRA 55VP — cai.hhu.decai.hhu.de
  4. [4]Inventory photo
  5. [5]bu.edu — bu.edubu.edu
  6. [6]Equipment Resources | CNF — cnf.cornell.educnf.cornell.edu
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Last updated Oct 8, 2026.

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