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CEE

100 Spin

Resist ProcessingCEE 100 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

100 Spin — Inventory photo
Fig. 01100 SpinInventory photo[1]

How it works

The CEE 100 allows programming of acceleration rate, hold speed, and step time for each of up to five steps per program. The acceleration can be set from 1 to 30,000 rpm/s (unloaded), the hold speed from 1 to 6,000 rpm, and the step time from 1 to 999 seconds. A typical program uses an acceleration of 10,000 rpm, a speed of 4,000 rpm, and a time of 45 seconds.[2][3]

What do the numbers mean?

Power & electrical2

Volts 115[1]
Accurate?
Watts 800W[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationVolts 115[1]
  • ConfigurationWatts 800W[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What spin speed range does the CEE 100 support?

The held angular speed is programmable from 1 to 6000 rpm, and the acceleration rate from 1 to 30000 rpm/s (unloaded).[2]

How many programs can be stored, and how many steps per program?

The CEE 100 can store up to ten programmable presets, each with up to five steps.[2]

What types of spin chucks are available?

Available chucks include 2.25" (57.2 mm) and 0.3125" (7.9 mm) sizes, accommodating various substrate dimensions.[2]

How is the centering of the substrate performed?

After pressing START, the machine rotates the substrate slowly for a centering test. The operator can press 0 to re-run the centering test if needed.[3][2]

What safety features does the CEE 100 have?

The spin coater has a plexiglass shield that must be closed before spinning begins, and a vacuum chuck secures the substrate during operation.[3][2]

Not publicly documented

The following facts about the 100 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the 100 Spin are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 100 Spin are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 100 Spin are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 100 Spin are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 100 Spin are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]https://nanofab.ku.edu/sites/nanofab/files/files/SOPs/PDMS%20CEE%20100%20Spinner%20SOP.pdf — nanofab.ku.edunanofab.ku.edu
  3. [3]https://www.nanofab.utah.edu/wp-content/uploads/2022/12/CEE-100-Procedure.pdf.pdf — nanofab.utah.edunanofab.utah.edu
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Last updated Oct 2, 2026.

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