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200 PCU Photoresist Stabilizerversus100 Spin

Axcelis 200 PCU Photoresist Stabilizer, CEE 100 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCU Photoresist StabilizerAxcelis
100 SpinCEE
OEMAxcelisCEE
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200CEE 100
Specifications
Configuration14 Amps[1]Volts 115[3]
Voltage380 V[1]—
Frequency50 Hz[1]—
Phase3 Phase[1]—
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing