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Axcelis

200 PCU Photoresist Stabilizer

Resist ProcessingAxcelis NV GSD 200 family
Research Quality: 30% complete
200 PCU Photoresist Stabilizer — Inventory photo
Fig. 01200 PCU Photoresist StabilizerInventory photo[1]

What it is

The Axcelis 200 PCU is a photoresist stabilizer.[1][2]

What do the numbers mean?

Power & electrical6

14 Amps[1]
Accurate?
Voltage
380 V[1]
Accurate?
Frequency
50 Hz[1]
Accurate?
Phase
3 Phase[1]
Accurate?
12 Amps[2]
Accurate?
Voltage
400 V[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration14 Amps[1]
  • Voltage380 V[1]
  • Frequency50 Hz[1]
  • Phase3 Phase[1]
  • Configuration12 Amps[2]
  • Voltage400 V[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the Axcelis 200 PCU?

It is a photoresist stabilizer.[1][2]

What manufacturer and model are identified?

The manufacturer is Axcelis and the model is 200 PCU.[1][2]

Not publicly documented

The following facts about the 200 PCU Photoresist Stabilizer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 200 PCU Photoresist Stabilizer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 200 PCU Photoresist Stabilizer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 200 PCU Photoresist Stabilizer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 200 PCU Photoresist Stabilizer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 200 PCU Photoresist Stabilizer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
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Last updated Sep 27, 2026.

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