Waferpedia

Manufacturer

Laurell

Looking for practical guidance on Laurell? The reference remains the primary source; requests are private, the network is growing, and a relevant match is not guaranteed.

47 entries

  1. WS-1000MHLaurell

    The Laurell WS-1000MH is a mini wet station in the WS-1000MH series of mini spin-process stations.

    CategoryMini wet station
  2. SU-8Laurell

    The Laurell SU-8 is a spin station dedicated to applying SU-8 photoresist for lithography processes.

    CategoryLithography
  3. WS-750Lz-23BLaurell

    The Laurell WS-750Lz-23B is a spin coater in the 750 Series. The Laurell WS-750Lz-23B has a maximum substrate size of ø150mm (5" x 5") and a maximum speed of 12,000 rpm.

    CategoryResist ProcessingWafer150mm
  4. EDC-HL-15Laurell

    The Laurell EDC-HL-15 B is a 650-series EDC spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

    CategorySpin coaterWafer300mm
  5. EDC-650Laurell
    Wafer100mm
  6. WS-650MZLaurell
    CategorySpinner
  7. Lz-23Laurell

    The Laurell Lz-23 B is a compact 650-series spin coater that accommodates up to 150 mm wafers and 5 in × 5 in substrates.

    CategorySpin coaterWafer150mm
  8. WS-1000Laurell

    The Laurell WS-1000 is a wet station in the WS-1000 Series Spin-Process Stations line.

    CategoryWet Station
  9. EDC-650-23Laurell

    The Laurell EDC-650-23 is a 650-series spin processor that accommodates up to Ø 150 mm wafers and 5" × 5" substrates.

    CategorySpin coater / spin processorWafer150mm
  10. EDC-650-15Laurell

    The Laurell EDC-650-15 is a station-mounted 650-series spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

    CategorySpin coater / spin processorWafer300mm
  11. WS-650-23 B SpinLaurell

    The Laurell WS-650-23 B is a compact spin coater for up to 150 mm wafers and 5"×5" substrates, with a maximum rotational speed of 12,000 RPM based on a 100 mm silicon wafer.

  12. EDC-HL-23Laurell

    The Laurell EDC-HL-23 B is a compact EDC spin processor with capacity for up to 150 mm wafers and 5 in x 5 in substrates.

    CategorySpin coaterWafer150mm
  13. H6-23Laurell

    The Laurell H6-23 is a compact HL Series spin coater for wafers and substrates, with a maximum rotational speed of 12,000 RPM.

    CategorySpin coaterWafer150mm
  14. WS-650-8Laurell

    The Laurell WS-650-8B is a compact 650-series spin coater with a maximum rotational speed of 12,000 RPM and support for wafers up to 200 mm.

    CategorySpin coaterWafer200mm
  15. 750 SeriesLaurell

    The Laurell 750 Series is a spin coater line for spin coating applications.

    CategoryResist ProcessingWafer150mm
  16. WS-650-23BLaurell

    Laurell WS-650-23B is a 650 Series spin coater with a maximum substrate size of ø150mm (5" × 5") and a maximum speed of 12,000 rpm.

    CategoryResist ProcessingWafer150mm
  17. WS-650-8BLaurell

    The Laurell WS-650-8B is a spin coater in the 650 Series with a maximum substrate size of ø200mm (7" x 7") and a maximum speed of 12,000 rpm.

    CategoryResist ProcessingWafer200mm
  18. WS-650-15BLaurell

    The Laurell WS-650-15B is a spin coater in the 650 Series.

    CategoryResist ProcessingWafer300mm
  19. EDC-650-23BLaurell

    The Laurell EDC-650-23B is an EDC System spin coater from the 650 Series, supporting substrates up to 150mm diameter and spin speeds up to 12,000 rpm.

    CategoryResist ProcessingWafer150mm
  20. EDC-650-8BLaurell

    The Laurell EDC-650-8B is an EDC System 650 Series spin coater with a maximum substrate size of 200mm (7" x 7").

    CategoryResist ProcessingWafer200mm
  21. WS-650-23 BLaurell

    The Laurell WS-650-23 B is a 650-series spin coater. The Laurell WS-650-23 B has a maximum substrate size of ø 150mm (5" x 5") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer150mm
  22. WS-650-8 BLaurell

    The Laurell WS-650-8 B is a 650-series spin coater with a maximum substrate size of 200mm (7" x 7") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer200mm
  23. EDC-650-23 BLaurell

    The Laurell EDC-650-23 B is an EDC System 650-series spin coater with a maximum substrate size of ø 150mm (5" × 5") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer150mm
  24. EDC-650-8 BLaurell

    The Laurell EDC-650-8 B is an EDC System 650-series spin coater with a maximum substrate size of ø 200mm (7" × 7") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer200mm
  25. EDC-650-15 BLaurell

    Laurell EDC-650-15 B is an EDC System 650-series spin coater with a maximum substrate size of 300mm (9" x 9").

    CategoryResist Processing
  26. H6-23 BLaurell

    The Laurell H6-23 B is a Spin Coater in the 650-series. The Laurell H6-23 B accepts a maximum substrate size of ø 150mm (5" × 5") and is rated to 12000 rpm.

    CategoryResist ProcessingWafer150mm
  27. H6-8 BLaurell

    The Laurell H6-8 B is a spin coater in the 650-series with a maximum substrate size of 200mm (7" x 7"), a maximum speed of 12000 rpm, and tabletop, in-deck, or on-deck mounting options.

    CategoryResist ProcessingWafer200mm
  28. EDC-HL-23 BLaurell

    The Laurell EDC-HL-23 B is an EDC System 650-series spin coater with a maximum substrate size of 150 mm (5" x 5") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer150mm
  29. EDC-HL-8 BLaurell

    Laurell EDC-HL-8 B is an EDC System 650-series spin coater with a maximum substrate size of 200mm (7" x 7").

    CategoryResist ProcessingWafer200mm
  30. EDC-HL-15 BLaurell

    The Laurell EDC-HL-15 B is an EDC™ System spin coater in the 650-series. The Laurell EDC-HL-15 B accepts a maximum substrate size of 300mm (9" x 9") and reaches 12000 rpm.

    CategoryResist ProcessingWafer300mm
  31. Lz-23 BLaurell

    The Laurell Lz-23 B is a 650-series spin coater that accepts substrates up to 150mm (5×5 inches) and spins up to 12000 rpm.

    CategoryResist ProcessingWafer150mm
  32. EDC-650-15BLaurell

    The Laurell EDC-650-15B is an EDC System spin coater. The Laurell EDC-650-15B supports a maximum substrate size of 300 mm (9" x 9").

    CategoryResist ProcessingWafer300mm
  33. WS-750-23 BLaurell

    The Laurell WS-750-23 B is a 750-series spin coater that processes substrates up to 150mm (5" x 5") with a maximum speed of 12000 rpm and offers tabletop, in-deck, or on-deck mounting options.

    CategoryResist Processing
  34. H6-15 BLaurell

    The Laurell H6-15 B is a spin coater in the 650-series. The Laurell H6-15 B supports a maximum substrate size of 300mm (9" x 9") and a maximum speed of 12000 rpm.

    CategoryResist ProcessingWafer300mm
  35. EDC-650-8Laurell

    The Laurell EDC-650-8 is a station-mounted spin processor that accommodates up to 200 mm wafers and 7 in x 7 in substrates.

    CategorySpin processorWafer200mm
  36. WS-650-23Laurell

    The Laurell WS-650-23 is a station-mounted spin coater in the WS-650 series that accommodates up to ø 150 mm wafers and 5" × 5" substrates.

    CategorySpin coaterWafer150mm
  37. WS-650Laurell

    The Laurell WS-650 is a spin coater used for spincoating photoresists.

    CategorySpin coaterWafer150mm
  38. 400-seriesLaurell

    Laurell's WS-400-6NPP is a 400-series spin coater with a 400-series process controller, a 1.75" vacuum chuck, and support for wafers up to 150 mm.

    CategorySpin coaterWafer150mm
    Discontinued
  39. EDC-HL-8Laurell

    The Laurell EDC-HL-8 B is a compact EDC spin processor that accommodates up to 200 mm wafers and 7 in × 7 in substrates.

    CategorySpin coaterWafer200mm
  40. H6-15Laurell

    The Laurell H6-15 is a compact HL Series spin coater designed for glove box use and specified to accommodate up to ø 300mm wafers and 9" × 9" substrates.

    CategorySpin coaterWafer300mm
  41. H6-8Laurell

    The Laurell H6-8 is a 650-series HL spin coater that accommodates up to 200mm wafers and 7" × 7" substrates and has a maximum rotational speed of 12,000 RPM.

    CategorySpin coaterWafer200mm
  42. WS-650-15Laurell

    The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.

    CategorySpin coaterWafer300mm
  43. WS-650Mz-8NPPBLaurell

    The Laurell WS-650Mz-8NPPB is a spin coater that can take up to 8 inch wafers and go up to 10000 rpm.

    CategorySpin CoaterWafer8"
  44. WS-650-15 BLaurell

    The Laurell WS-650-15 B is a 650-series spin coater for resist processing that accommodates up to 300mm wafers and reaches 12,000 RPM.

    CategoryResist ProcessingWafer300mm
  45. WS 400 B 6 NP P SpinLaurell
    CategoryResist Processing
  46. WS-650MZ-23NPPBLaurell
    CategoryWet Processing / Clean
  47. WS-65Laurell
    Categoryspin coater