Laurell
WS-650-8B
The Laurell WS-650-8B is a spin coater. The Laurell WS-650-8B has a maximum substrate size of ø200mm (7" x 7"). The Laurell WS-650-8B has a maximum speed of 12,000 rpm.[1]
What it is
General reference — not yet source-verifiedSpin coaters are machines that apply uniform thin films of liquid materials, such as photoresist, onto flat substrates by rotating the substrate at high speed. The centrifugal force spreads the liquid radially outward, and the final film thickness depends on spin speed, viscosity, and evaporation rate.
How it works
General reference — not yet source-verifiedThe substrate is placed on a chuck that is rotated by a motor. The liquid coating material is dispensed onto the center of the substrate while it is either stationary or slowly spinning. The substrate then accelerates to a high rotation speed, causing the liquid to spread into a thin layer by centrifugal force. The spin speed and acceleration profile control the final film uniformity and thickness. Many spin coaters have programmable recipes for spin speed, ramp rates, and dispense sequences.
Where it fits in the process flow
General reference — not yet source-verifiedSpin coating is typically performed after substrate cleaning and dehydration baking, and before a soft-bake or exposure step in photolithography. The coated substrate then proceeds to alignment and exposure on a mask aligner or stepper, followed by development and subsequent processing.
What do the numbers mean?
Wafer handling1
Configuration & options4
What replaced it?
Related models
- siblingLaurell EDC-650-23B— 650 Series spin coater with Ø200mm substrate capacitysource[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What mounting options are available for the Laurell WS-650-8B?
Mounting options include tabletop, in-deck, and on-deck configurations.[1]
Not publicly documented
The following facts about the WS-650-8B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-8B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WS-650-8B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS-650-8B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-650-8B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-650-8B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]laurell.com — laurell.comlaurell.com
Last updated Oct 7, 2026.
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View all →The Laurell EDC-650-8 B is an EDC System 650-series spin coater with a maximum substrate size of ø 200mm (7" × 7") and a maximum speed of 12000 rpm.
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The Laurell H6-8 B is a spin coater in the 650-series with a maximum substrate size of 200mm (7" x 7"), a maximum speed of 12000 rpm, and tabletop, in-deck, or on-deck mounting options.
