Zeiss
Sigma HDVP
The Zeiss Sigma HDVP is a scanning electron microscope (SEM) designed for high-resolution imaging. The Zeiss Sigma HDVP offers acceleration voltage from 0.02 kV to 30 kV and a magnification range of 10x to 1,000,000x. The Zeiss Sigma HDVP's specimen chamber measures 358 mm, and the system includes multiple detectors such as HD AsB, CL, STEM, and SCD.[1]
What it is
The Sigma HDVP has an acceleration voltage range from 0.02 kV to 30 kV and a magnification range from 10x to 1,000,000x. The specimen chamber measures 358 mm in diameter.[1][3]
The specimen stage provides five axes of movement: X 30 mm, Y 130 mm, Z 50 mm, tilt from -3° to 70°, and rotation 360°. Detectors include an HD AsB detector, a CL detector, a STEM detector, and an SCD. Pumps comprise a turbomolecular pump, an ion getter pump, and an ultimate high vacuum pump. The system is controlled by a PC with Windows 7, 4 GB RAM, a hard disk drive, and a 19-inch TFT monitor.[1]
How it works
General reference — not yet source-verifiedThe Sigma HDVP uses a field emission electron gun to generate a focused electron beam that is scanned across the sample surface. The primary beam interacts with the sample, producing secondary electrons, backscattered electrons, and other signals, which are collected by detectors to form an image. The variable pressure mode allows imaging of non-conductive samples by introducing a gas into the chamber to reduce charging effects.
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Optics & imaging8
Control & software4
- Dual joystick control box[1]
Configuration & options15
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Thermo Fisher Scientific FEI Quanta 450 FEG— Same function class: Metrology & Inspection, nullCompare in depthsource[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Sigma HDVP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma HDVP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Sigma HDVP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sigma HDVP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Sigma HDVP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Sigma HDVP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
- [3]Zeiss Axioscope 7 vs Zeiss Sigma HDVP | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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