Waferpedia

Zeiss

O Inspect 322 CMM

The Zeiss O Inspect 322 is a coordinate measuring machine. The Zeiss O Inspect 322 has a measuring volume of 300 mm in X, 200 mm in Y, and 200 mm in Z. The Zeiss O Inspect 322 uses multisensor measurement technology including optical and tactile passive sensors.[1]

O Inspect 322 CMM — Inventory photo
Fig. 01O Inspect 322 CMMInventory photo[1]

Power

50-60 Hz[2]

Optics

Pre-wired for DotScan optical sensor[1]

What it is

The Zeiss O Inspect 322 is a coordinate measuring machine (CMM) manufactured by Carl Zeiss. The machine combines optical and tactile passive measurement sensors in a single platform for dimensional inspection tasks.[1]

How it works

The O Inspect 322 employs multisensor measurement technology incorporating optical and tactile passive probes. The system is pre-wired for a DotScan optical sensor and includes a VAST XXT TL3 touch probe with a dedicated adapter plate carrying an embedded identification chip.[1]

A PC-based Integrated Scanning Control (ISC) coordinates the measurement sequences. The machine is equipped with integrated passive vibration damping to reduce environmental disturbances. Calibration is supported by an optical template for the Discovery Zoom lens and reference artifacts: a 25 mm diameter sphere and a 16 mm inner diameter ring.[1]

Applications

General reference — not yet source-verified

Common industries include automotive, aerospace, medical device manufacturing, and general precision engineering. The machine can inspect parts made of metals, plastics, ceramics, and composites.

What do the numbers mean?

Power & electrical3

50-60 Hz[2]
Accurate?
100-240 V[2]
Accurate?
Electrical
100-240 V, 50-60 Hz, max 600 VA[2]
Accurate?

Optics & imaging7

Multisensor (optical, tactile passive) measurement technology[1]
Accurate?
Pre-wired for DotScan optical sensor[1]
Accurate?
Measurement technology
Multisensor (optical, tactile passive)[1]
Accurate?
Pre-wired for optical sensor
Pre-wired for DotScan optical sensor[1]
Accurate?
Optical calibration template
for Discovery Zoom lens[1]
Accurate?
Multisensor technology
Optical, tactile passive[1]
Accurate?
Pre-wired for DotScan optical sensor
Yes[1]
Accurate?

Control & software9

Wired control panel w/two joysticks, power ON switch[1]
Accurate?
Network Interface Card (NIC)I201-T1 GbE[1]
Accurate?
Control
PC-based Integrated Scanning Control (ISC)[1]
Accurate?
Control panel
Wired control panel with two joysticks, power ON switch[1]
Accurate?
Network Interface
Network Interface Card (NIC) I201-T1 GbE[1]
Accurate?
Software
CALYPSO basis cnc + curve + VAST probing, BasLic, Dongle[1]
Accurate?
Integrated Scanning Control (ISC)
PC-based[1]
Accurate?
Control panel
Wired, two joysticks, power ON switch[1]
Accurate?
Network Interface Card
NIC I201-T1 GbE[1]
Accurate?

Configuration & options19

Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[1]
Accurate?
VAST XXT TL3 sensor[1]
Accurate?
One VAST XXT TL3 adapter plate with embedded ID chip[1]
Accurate?
CALYPSO basis cnc + curve + VAST probing, BasLic, Dongle[1]
Accurate?
P/N
636520-9932-000[2]
Accurate?
Max. 600 VA[2]
Accurate?
Measuring volume X
300 mm[1]
Accurate?
Measuring volume Y
200 mm[1]
Accurate?
Measuring volume Z
200 mm[1]
Accurate?
Vibration damping
Integrated passive vibration damping[1]
Accurate?
Reference sphere diameter
25 mm[1]
Accurate?
Reference ring inner diameter
16 mm[1]
Accurate?
Tactile sensor
VAST XXT TL3 sensor[1]
Accurate?
Adapter plate
One VAST XXT TL3 adapter plate with embedded ID chip[1]
Accurate?
Vibration damping
Integrated passive[1]
Accurate?
Reference sphere
Diameter 25 mm[1]
Accurate?
Reference ring
Inner diameter 16 mm[1]
Accurate?
Sensor
VAST XXT TL3[1]
Accurate?
Adapter plate
VAST XXT TL3 with embedded ID chip[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
O-INSPECT 3 / 2 / 2—2022Stated with part number 636520-9932-000, electrical ratings of 50-60 Hz, max. 600 VA, 100-240 V, and vintage 2022.Equipment inventory listing[2]
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50-60 Hz[2]
  • Configuration100-240 V[2]
  • Electrical100-240 V, 50-60 Hz, max 600 VA[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the measuring volume of the Zeiss O Inspect 322?

The measuring volume is X = 300 mm, Y = 200 mm, Z = 200 mm.[1]

What sensor types does the O Inspect 322 support?

The machine supports multisensor measurement with optical (pre-wired for DotScan) and tactile passive (VAST XXT TL3) sensors.[1]

What measurement software is used?

The system operates with CALYPSO basis cnc + curve + VAST probing, including a base license and dongle.[1]

What reference artifacts are included?

The reference kit includes a reference sphere of 25 mm diameter and a reference ring of 16 mm inner diameter.[1]

Not publicly documented

The following facts about the O Inspect 322 CMM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the O Inspect 322 CMM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the O Inspect 322 CMM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the O Inspect 322 CMM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the O Inspect 322 CMM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the O Inspect 322 CMM are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
Was this page accurate?

Last updated Oct 1, 2026.

Compare with similar tools

View all →