YES
PB12
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Wafer size
300mm
Vacuum
high vacuum (10^-5)[1]
What it is
General reference — not yet source-verifiedVacuum cure ovens are batch thermal processing systems used in semiconductor and MEMS manufacturing to apply controlled heating under vacuum or inert atmosphere for processes such as polymer curing, metal annealing, and dehydration.
What can it run?
Process applications and technology nodes documented for this tool.
- MEMS and semiconductor process applications
- Wafer dehydration
- Getter activation
- Metal annealing
- Thermal treatment of thin film resistors
What do the numbers mean?
Vacuum & pumping1
Wafer handling2
Configuration & options3
Vintage & configurations
What replaced it?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuumhigh vacuum (10^-5)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the PB12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PB12 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PB12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PB12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PB12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PB12 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]PB12 — YES | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 22, 2026.
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