YES
450 PB 12 Polyimide
The YES 450 PB 12 Polyimide is a thermal/diffusion bake oven. The YES 450 PB 12 Polyimide is a batch process bake oven with capacity for two 25-wafer cassettes and 300mm FOUPs. The YES 450 PB 12 Polyimide uses wafer cassettes loaded manually into the machine.[1][2]
Wafer size
300mm
Power
208V, 3 Phase 50/60 Hz, 40 amps[2]
Vacuum
Alternate vacuum valve for process vacuum[2]
Gas delivery
1 standard up to 3 optional[2]
What it is
How it works
Where it fits in the process flow
Applications
The YES 450 PB 12 Polyimide is used for polyimide bake processing.[2]
What do the numbers mean?
Power & electrical1
Vacuum & pumping4
Wafer handling5
- Wafer size
- Capacity is two 25 wafer cassettes in a batch process (50 wafers at a time) - 300mm FOUP[2]
- Wafer size
- Uses wafer cassette (manually bring wafer to the machine, then load wafers inside)[2]
- Wafer handling
- Uses wafer cassette; wafers are manually brought to the machine and loaded inside[2]
Gas & chemistry5
- Preheated N, (Process Gas)[2]
Control & software3
Dimensions & facilities1
- Includes full-dimension 100-micron inlet for preheated laminar nitrogen purge[2]
Configuration & options18
- Dual door 0-Rings with nitrogen purge between the seals, eliminates oxygen leakage through door seal[2]
- Manual Throttle Valve assembly[2]
- Air-cooled chamber with external forced air convection[2]
- Swagelok 1" lines and valves[2]
- Shut-off switch located below door to shut off heaters if door is opened[2]
- Dual Condensate Filter Assembly[2]
- Operation Temperature
- Ambient to 450° C with LED temperature readout and ramp-up/down capability[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Process Gas Inputs1 standard up to 3 optional[2]
- ConfigurationPreheated N, (Process Gas)[2]
- Mass Flow Controllersoptional, up to 3[2]
- ConfigurationAlternate vacuum valve for process vacuum[2]
- ConfigurationVacuum plumbing with VCR[2]
- Gas delivery1 standard up to 3 optional[1]
- Process gasPreheated N2[2]
- VacuumAlternate vacuum valve for process vacuum[1]
- Vacuum plumbingVCR[1]
- Voltage208V, 3 Phase 50/60 Hz, 40 amps[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 450 PB 12 Polyimide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 PB 12 Polyimide are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 450 PB 12 Polyimide are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 450 PB 12 Polyimide are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 450 PB 12 Polyimide are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 450 PB 12 Polyimide is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
Last updated Oct 7, 2026.
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