Tokyo Electron
Act 12 DUV Photoresist Coater Developer Track
The Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is a deep ultraviolet photoresist coater and developer track. The Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track is configured for 300 mm, 12 inch wafers. The Tokyo Electron Act 12 DUV Photoresist Coater / Developer Track has right-to-left wafer flow.[1][2]
Plate 01TEL ACT 12 Video 1
Brandon SkaggsWatch on YouTube
Wafer size
The direction of wafer flow is right to left
Gas delivery
Chemical Cabinet 1[1]
How it works
Where it fits in the process flow
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Temp. Cont. Unit / system leaky and deactivated
- T&H chamber requires service
- Resist pump status unclear
- 1 FOUP load port defective
- IRA Z driver missing
- WEE unit defective
What do the numbers mean?
Wafer handling8
- 4 FOUP load ports for 12” wafers[1]
Gas & chemistry7
Control & software3
Configuration & options17
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationDispense Monitoring system on all 24 resist lines[1]
- ConfigurationAut- air vent function on all resist LE tanks[1]
- ConfigurationChemical Cabinet 1[1]
- ConfigurationChemical Cabinet 2[1]
- ConfigurationChemical Cabinet 3[1]
- ModelAct 12 DUV Photoresist Coater / Developer Track[1]
- CategoryResist Processing[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Act 12 DUV Photoresist Coater Developer Track are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Act 12 DUV Photoresist Coater Developer Track are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Act 12 DUV Photoresist Coater Developer Track are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Act 12 DUV Photoresist Coater Developer Track are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Act 12 DUV Photoresist Coater Developer Track is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Act 12 DUV Photoresist Coater Developer Track are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Tokyo Electron ACT 12 DUV Photoresist Coater and Developer for sale via bidding — linkedin.comlinkedin.com
Last updated Oct 4, 2026.
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