TEGAL
515
The Tegal 515 is a plasma asher. The Tegal 515 features an aluminum chamber. The Tegal 515 handles wafers up to 5 inches.[1][2]
What it is
The TEGAL 515 is a plasma asher manufactured by Tegal. The machine is used for removing organic photoresist from semiconductor wafers. The TEGAL 515 features an aluminum chamber.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedPlasma ashers such as the TEGAL 515 are used in the photoresist stripping step of semiconductor fabrication. After a wafer has been patterned and etched, or after ion implantation, the remaining photoresist mask must be removed before subsequent processing. The asher sits downstream of etch or implant tools and upstream of cleaning, inspection, or deposition steps.
Applications
The TEGAL 515 is applied to photoresist stripping and descum processes in semiconductor manufacturing. Descum is a short oxygen plasma treatment used to remove trace organic residues from wafer surfaces before deposition or metallization. The machine can handle wafers up to five inches in diameter.[1][2]
What do the numbers mean?
Wafer handling2
- Refurbished Wafer Prober
- Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]
Gas & chemistry1
Optics & imaging1
- Refurbished Mask Aligner
- Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]
Dimensions & facilities1
Configuration & options7
- Refurbished RTP RTA
- AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]
- KLA-Tencor Spare Parts and Service
- RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]
- Refurbished Isotropic Plasma Etcher
- Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]
- Refurbished PECVD, ALD Equipment
- Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- Single gas input
- Optional dual gas control box is available
- Rebuilt direct drive pump
- Fomblin/Krytox prep for pumping explosive gas
- 1/4 gallon reclaimed Fomblin/Krytox oil
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Gas inputSingle gas input (optional dual gas control box)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 515 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 515 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 515 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 515 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 515 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 515 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]dealer listingsemistarcorp.com
- [2]Tegal 515 Plasma Asher - J.M. Industries — jmind.comjmind.com
Last updated Oct 11, 2026.
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