SVG
8626 Photoresist
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SVG 8626 is a 6-inch cassette-to-cassette photoresist coater. The SVG 8626 has a 2-coat configuration and excludes pumps. The SVG 8626 is a dual track coater with hotplates.[1][2][3]
What it is
The SVG 8626 is a photoresist coater used in semiconductor resist processing. The equipment is a cassette-to-cassette dual-track photoresist coater with hotplates.[3][1]
How it works
General reference — not yet source-verifiedA photoresist coater applies a liquid resist film to wafer surfaces before exposure and subsequent pattern transfer. A cassette-to-cassette track system typically handles wafers in batches through the coating sequence, and hotplates provide thermal processing within the track.
What do the numbers mean?
Vacuum & pumping2
- Excludes pumps[1]
Wafer handling3
- Cassette to cassette[1]
Gas & chemistry2
Configuration & options7
- 2 coat[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 8626 Photoresist are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8626 Photoresist are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 8626 Photoresist are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8626 Photoresist are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8626 Photoresist are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 8626 Photoresist is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]8626 Photoresist — SVG | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]jmind.com — jmind.comjmind.com
Last updated Oct 3, 2026.
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