Waferpedia

Optorun

OTFC 1300 CBI Thin Film

Precision OpticsOptorun OTFC 1300 family
Research Quality: 20% complete
OptorunOTFC 1300 CBI Thin Film
No photo available yet

What is it?

The Optorun OTFC 1300 CBI is a thin film coater with center driving, a substrate dome size of φ1130 mm, EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.

What do the numbers mean?

Wafer handling2

Center driving Substrate dome size φ1130mm[1]
Accurate?
Substrate heater 350℃ max[1]
Accurate?

Optics & imaging1

60-point optical thickness monitor[1]
Accurate?

Configuration & options1

EBsourcex2[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the OTFC 1300 CBI Thin Film are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OTFC 1300 CBI Thin Film are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the OTFC 1300 CBI Thin Film are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the OTFC 1300 CBI Thin Film are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OTFC 1300 CBI Thin Film are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OTFC 1300 CBI Thin Film is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
Was this page accurate?

Last updated Sep 25, 2026.

Compare with similar tools

View all →