Onto Innovation
NSX 105
What it is
Where it fits in the process flow
General reference — not yet source-verifiedThe NSX 105 is placed in the semiconductor fabrication line after key process steps such as photolithography, etch, or deposition. The system performs in-line inspection to detect defects before subsequent processing. The tool can also be used for off-line monitoring of product wafers.
Applications
General reference — not yet source-verifiedThe NSX 105 is used for defect detection on patterned wafers. Applications include identifying particles, scratches, pattern defects, and other yield-limiting anomalies. The system supports process development and quality control in wafer fabrication.
What do the numbers mean?
Power & electrical5
Wafer handling9
Optics & imaging5
Control & software2
- Monitor, Keyboard, Main PC[1]
Configuration & options18
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSX 105 | — | 2003–2007 | Source records describe configurations including 1 chamber / 2LP, load ports for 6" and 8", Brooks robot and aligner, 12" wafer stage, and CCD 3D camera options, with vintages stated as 2003, 2004, and 2007. | Equipment inventory listing[6] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- ONTO / Rudolph / August NSX 105 Spare PartsIn Productionsource[9]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NSX 105 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 105 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSX 105 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 105 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 105 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the NSX 105 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
- [7]inventory listing
- [8]inventory listing
- [9]Equipment inventory listing
Last updated Sep 30, 2026.
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