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Comparison ledger

0010-18024 Pyrometer AssemblyversusNSX 105

Applied Materials 0010-18024 Pyrometer Assembly, Onto Innovation NSX 105, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
NSX 105Onto Innovation
OEMApplied MaterialsOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—12"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyOnto Innovation NSX 105
Cited variants—
Specifications
ConfigurationCapable of working on Applied Materials Radiance[2]Load port and stage[3]
Wafer size—12" wafer stage[1]
power—200-240 VAC[6]
Wafer Size—8 inch[1]
Wafer Stage—12 inch wafer stage[1]
Chamber Count—1 Chamber[4]
Load Ports—2x Load port (6",8")[1]
Robot & Aligner—Brooks Robot & Aligner[1]
Optics—5x Optic Lens with CCD 3D Camera (Sony)[1]
Frequency—50/60 Hz[6]
Power—200-240 VAC, Single Phase + GND[6]
Make—ONTO / Rudolph / August[3]
Model—NSX 105[3]
Wafer Sizes—8 inch[5]
Load port and stage—Included[3]
Chuck—Included[3]
Micro camera—Included[3]
CCD—Included[3]
Monitor, Keyboard, Main PC—Included[3]
Chambers—1 Chamber[4]
Vintage—2007[4]
Wafer stage—12" wafer stage[5]
Optics / Camera—5x Optic Lens with CCD 3D Camera (Sony)[5]
Load ports—Load port 6", 8" (x2)[5]
Mains frequency—50/60 Hz[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing