KLA

Surfscan SP 1 DLS Particle Defect

Metrology & Inspection KLA Surfscan family

Research Quality: 40% complete

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The KLA Surfscan SP 1 DLS is a particle defect detection system for semiconductor wafers.^[1]^[2]^[3]^[4]^[5]

Surfscan SP 1 DLS Particle Defect — Inventory photo — Fig. 01Surfscan SP 1 DLS Particle DefectInventory photo^[1]

Power

Readjusted all voltages to specs^[1]

Optics

26 A (Laser)^[2]

What it is

The KLA Surfscan SP 1 DLS runs on the Windows NT operating system. The system was manufactured in vintages ranging from 2002 to 2009.^[2]^[1]^[3]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Unit is non-operational
Monitor has no signal display during CPU boot up
Keyboard has no functionality
CPU boots up with display but mouse and keyboard not working
Need replacement of Bright Field laser: Hene 7mW laser PS is dead
Possible wiring issue
2 loadports, with 1 not functioning
Missing parts: analog boards x2 and DC distribution board

What do the numbers mean?

Power & electrical4

Readjusted all voltages to specs^[1]
Input Current: 30 A, 3 Phase, 50/60 Hz^[2]
Phase: 3 Phase^[3]
Frequency: 50/60 Hz^[2]

Wafer handling5

300mm FOUP handler^[1]; Single station FOUP handler.^[3]
Wafer size (8 inch configuration): 8 inch^[3]
Wafer size (12 inch configuration): 12 inch^[1]
Wafer handler: FOUP handler^[1]

Optics & imaging3

75mW Laser: visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.^[1]
Need replacement of Bright Field laser: Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)^[1]
Largest Load: 26 A (Laser)^[2]

Control & software2

2 hard drives with the software^[2]
Operating system: Windows NT^[2]

Configuration & options16

Unit is non-operational^[1]; CPU and HDD were removed from system^[1]; PS issues/storm and system repeatedly reboots itself^[1]; Repairs / Testing:^[1]; Removed and disconnected all boards from backplane for CPU testing only. Result: Monitor still has No signal display during CPU boot up^[1]
Retested the CPU at bench test: CPU boots up with display but mouse and keyboard not working^[1]; Retested on SP1 system test and results are unchanged.^[1]; Unable to continue further testing without CPU operational^[1]; CPU board order and received from a supplier, board tested before shipping^[1]; CPU board installed on the tool, tool powers on but no signal yet - possible wiring issue^[1]; Runs on windows NT^[2]
2 loadports: 1 not functioning^[2]; Missing parts^[3]; Analog boards x2^[3]; DC Distribution board^[3]
Input current: 30 A^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Surfscan SP 1 DLS Particle Defect System, 12 inch	—	2002	Listed as a 12-inch configuration with FOUP handler; one source describes it as non-operational, another notes Windows NT, two loadports, and input current details.	Equipment inventory listing^[1]
Surfscan SP 1 DLS Particle Defect System, 8 inch	—	2009	Listed as an 8-inch configuration with a single-station FOUP handler and missing analog boards x2 and DC distribution board.	Equipment inventory listing^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationReadjusted all voltages to specs^[1]
Input Current30 A, 3 Phase, 50/60 Hz^[2]
Phase3 Phase^[3]
Frequency50/60 Hz^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes can the KLA Surfscan SP 1 DLS handle?

The Surfscan SP 1 DLS is available in configurations for 200 mm (8 inch) and 300 mm (12 inch) wafers.^[1]^[2]^[3]^[4]

What operating system does the system run?

The Surfscan SP 1 DLS runs on the Windows NT operating system.^[2]

What are the electrical requirements of the system?

The system requires a three-phase, 30 A electrical supply at 50/60 Hz. The largest load on the laser is 26 A.^[2]^[3]

Does the system use a FOUP handler?

Yes, the 300 mm configurations use a FOUP handler for wafer transfer. Some units have a single-station FOUP handler, while others have two load ports.^[1]^[2]^[3]

Not publicly documented

The following facts about the Surfscan SP 1 DLS Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Surfscan SP 1 DLS Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Surfscan SP 1 DLS Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: university cleanroom staff or an OEM application specialist