Comparison ledger
KLA .496 PSL Wafer, KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA Surfscan |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[3] | 300mm FOUP handler[1] |
| Wafer size | 8 inch[3] | — |
| Traceability | NIST Traceable[3] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[3] | — |
| Category | Metrology & Inspection[4] | — |
| Retested the CPU at bench test | — | CPU boots up with display but mouse and keyboard not working[1] |
| 75mW Laser | — | visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1] |
| Need replacement of Bright Field laser | — | Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1] |
| 2 loadports | — | 1 not functioning[5] |
| Largest Load | — | 26 A (Laser)[5] |
| Input Current | — | 30 A, 3 Phase, 50/60 Hz[5] |
| Phase | — | 3 Phase[2] |
| Wafer size (8 inch configuration) | — | 8 inch[2] |
| Wafer size (12 inch configuration) | — | 12 inch[1] |
| Input current | — | 30 A[5] |
| Frequency | — | 50/60 Hz[5] |
| Operating system | — | Windows NT[5] |
| Wafer handler | — | FOUP handler[1] |
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