KLA
Archer 10 XT Overlay
Wafer size
200mm
Performance
Archer 10 XT Overlay[2]
What it is
How it works
General reference — not yet source-verifiedOverlay metrology tools measure the registration between patterned layers on a wafer so lithography alignment can be checked and corrected.
Mask aligner and overlay metrology classes use optical measurement of alignment targets and stage positioning to quantify layer-to-layer error.
Where it fits in the process flow
General reference — not yet source-verifiedOverlay metrology sits in the lithography control flow, where measured alignment error is used to tune exposure and correction settings.
Applications
What do the numbers mean?
Wafer handling6
Performance2
Control & software6
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What software version is used on the Archer 10 XT Overlay?
The Archer 10 XT Overlay uses Software 5.6.[1]
What type of computer does the Archer 10 XT Overlay use?
The Archer 10 XT Overlay uses an XP computer upgrade and a KLASS RS2 computer.[1]
What is the wafer handler configuration of the Archer 10 XT Overlay?
The Archer 10 XT Overlay has a 200 mm dual port open wafer handler.[1]
Not publicly documented
The following facts about the Archer 10 XT Overlay are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer 10 XT Overlay are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Archer 10 XT Overlay are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Archer 10 XT Overlay are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Archer 10 XT Overlay are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Archer 10 XT Overlay is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Archer AIM Advanced Optical Overlay Metrology Equipment - Certified Used Metrology Equipment | KLA-Tencor — kla-tencor.com (Dec 28, 2016)web.archive.org
Last updated Oct 5, 2026.
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