Comparison ledger
Filmetrics R50, KLA Archer 10 XT Overlay, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R50Filmetrics | |
|---|---|---|
| OEM | Filmetrics | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics R50 | KLA Archer |
| Specifications | ||
| Default configuration | configured by default for metallic layers[1] | — |
| Default sample thickness | 525 um +/- 25 um[1] | — |
| Equipment section | Metrology[1] | — |
| Related equipment on same page group | AIT CMT-SR2000N 4-Point Probe Measurement System; MPI TS150 Probe Station[1] | — |
| Measurement type | 4-point probe[1] | — |
| Default material | metallic layers[1] | — |
| Configuration | — | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[2] |
| Wafer size | — | 200mm dual port open wafer handler[2] |
| OEM | — | KLA[3] |
| Model | — | Archer 10 XT Overlay[3] |
| Category | — | Metrology & Inspection[3] |
| Description | — | 200mm overlay metrology system[3] |
| Software version | — | 5.6[2] |
| Wafer handler | — | 200mm dual port open wafer handler[2] |
| Chuck | — | 8" chuck[2] |
| Computer upgrade | — | XP computer upgrade[2] |
| Computer | — | KLASS RS2 computer[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →