KLA
P-2
Wafer size
200mm
Vacuum
200 mm sample table with vacuum[2]
What it is
The KLA P-2 is a metrology and inspection profilometer used for surface step-height measurement.[1][2]
The KLA P-2 is a Tencor P-2 Profilometer with a vacuum sample table and an optional three-dimensional scan mode.[2]
How it works
Where it fits in the process flow
The KLA P-2 supports inspection of samples up to 20 mm thick and samples with a minimum length of 25 mm.[2]
What do the numbers mean?
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Veeco Dektak— Same function class: Metrology & Inspection, 200mmCompare in depthsource[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Sample table200 mm sample table with vacuum[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurement range is given for the KLA P-2?
What is the minimum sample length for the KLA P-2?
Not publicly documented
The following facts about the P-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P-2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P-2 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
- [2]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]egr.vcu.eduegr.vcu.edu
Last updated Oct 5, 2026.
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