KLA
Alpha Step 200
The KLA Alpha Step 200 is a profilometer. The KLA Alpha Step 200 is specified with a 6-inch vacuum test chuck. The KLA Alpha Step 200 has 90-130 VAC, 50/60 Hz, 120 VA max power requirements.[1][2]
How it works
The Alpha Step 200 presents sample imagery through video zoom of the substrate with magnifications, and an intuitive user interface allows application-specific recipes to be programmed. Multi-scan average mode scans are available for improving measurement repeatability. The system includes a built-in printer and comprehensive data analysis software.[8]
What do the numbers mean?
Power & electrical2
- 50/60 Hz[1]
Vacuum & pumping2
- 6” Vacuum test chuck[1]
Performance1
- Measurement functions
- Step heights, etch depths, coating thicknesses, micro-roughness, and other high-precision surface characteristics[8]
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the KLA Alpha Step 200?
The KLA Alpha Step 200 is a stylus-based surface profiler and a metrology and inspection tool.[2][8]
What chuck is specified for the KLA Alpha Step 200?
The Alpha Step 200 is specified with a 6-inch vacuum test chuck.[1][2]
What vertical resolution and range does the Alpha Step 200 offer?
The vertical resolution is 15 angstroms with a ±160 k angstrom range, and 20 nm with a ±160 nm range.[8]
Not publicly documented
The following facts about the Alpha Step 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha Step 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha Step 200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha Step 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alpha Step 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alpha Step 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Alpha Step 200 — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]capexoutsource.com — capexoutsource.comcapexoutsource.com
- [9]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu
Last updated Oct 10, 2026.
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