KLA Alpha Step

Models in this family

1. 

   Alpha Step 10-00030
2. 

   Alpha Step 200

   The KLA Alpha Step 200 is a profilometer with a 6" vacuum test chuck and 90-130 VAC, 50/60 Hz, 120 VA max power requirements.

3. 

   Alpha Step 500

   The KLA Alpha Step 500 is a profilometer.

4. 

   Alpha Step D 300 Stylus

   The KLA AlphaStep D-300 is a stylus-based surface profiler that measures step heights from 50 nm to 300 µm.

5. Alpha Step D 500 Wafer Profiler Meter

   The KLA Alpha Step D 500 Wafer Profiler Meter is a stylus profiler for 2D step height measurement, roughness, bow, and stress metrology.

6. 

   Alpha Step D 600 Stylus Profiler

   The KLA Alpha Step D 600 is a stylus profiler with optical lever sensing, motorized sample stage, side view optics, and profiler 2D acquisition and surface analysis software.

7. 

   Alpha Step IQ Surface

   The KLA Alpha Step IQ is a surface profilometer.