Hitachi
SU 8030 FEG-SEM
Plate 01Hitachi S-4800 and SU8030 FE-SEM Instructional Video - Northwestern University
NUANCE CenterWatch on YouTubePlate 02Loading the PS8 Prober Shuttle on a Hitachi SU-8030 microscope
KleindiekNanotechnikWatch on YouTube
Wafer size
4"
Power
Requires video amp (P/N536-9800)[1]
Vacuum
TMP Dry Vacuum System[1]
Optics
Hitachi Solid State Backscattered Detector[1]
What it is
The Hitachi SU 8030 FEG-SEM is a field-emission-gun scanning electron microscope used for metrology and inspection.[1][2]
The Hitachi SU 8030 FEG-SEM is a computer-controlled instrument with a motorized stage, multiple electron detectors, an airlock, beam deceleration, and dry vacuum support.[1]
How it works
The Hitachi SU 8030 FEG-SEM uses a motorized stage, a triple electron detector system with Super ExB, beam deceleration, and a dry vacuum system.[1]
Where it fits in the process flow
General reference — not yet source-verifiedA scanning electron microscope in this class sits in metrology and inspection workflows for checking structure, surface condition, and process-related defects after fabrication steps.
Applications
What do the numbers mean?
Power & electrical1
- Requires video amp (P/N536-9800)[1]
Vacuum & pumping2
- TMP Dry Vacuum System[1]
Wafer handling1
Optics & imaging3
Control & software6
Configuration & options15
- 6" Specimen Exchange Airlock[1]
- Beam Deceleration System[1]
- PCI Intergated Data Managment and Image Processing System[1]
- Win XP OS with CD-R/W, Ethernet Card and HD Backup system[1]
- UL and S2-02 Safety Compliance[1]
- Retractable[1]
- For SU8030/SU8040[1]
- Video Amplifier Unit (2-Channel) for SU8000 series[1]
- Required for YAG or SS BSE, TE, or EBIC Imaging[1]
- Haskris Air-Cooled Water Recirculator[1]
- SEMI Standard[1]
- Infrared Chamber Scope[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of instrument is the Hitachi SU 8030 FEG-SEM?
The Hitachi SU 8030 FEG-SEM is a field-emission-gun scanning electron microscope for metrology and inspection.[1][2]
What stage motion does the Hitachi SU 8030 FEG-SEM have?
The Hitachi SU 8030 FEG-SEM has a computer-controlled 5-axis motorized stage with a 110mm by 110mm travel area.[1]
Not publicly documented
The following facts about the SU 8030 FEG-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 8030 FEG-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 8030 FEG-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 8030 FEG-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SU 8030 FEG-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SU 8030 FEG-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]SU 8030 FEG-SEM Alternatives — Similar Metrology & Inspection Equipment | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 1, 2026.
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