Hitachi
SU 8010
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi SU 8010 is a scanning electron microscope used in metrology and inspection.[5][6]
The Hitachi SU 8010 is a cold field emission scanning electron microscope with energy-dispersive spectrometer capability in some installations.[4]
How it works
Where it fits in the process flow
The Hitachi SU 8010 is used for demanding applications in materials research.[2]
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Operating voltage range100 V to 30 kV[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SU 8010 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 8010 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 8010 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 8010 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SU 8010 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SU 8010 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]matter-systems.research.gatech.edu — matter-systems.research.gatech.edumatter-systems.research.gatech.edu
- [3]nnci.net — nnci.netnnci.net
- [4]nanofc2.web.nycu.edu.tw — nanofc2.web.nycu.edu.twnanofc2.web.nycu.edu.tw
- [5]Equipment inventory listing
- [6]SU 8010 — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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