Hitachi
CG 5000 CD-SEM
Wafer size
Automatic Beam Alignment on wafer
Power
Circulator Input Voltage Modification[1]
Performance
0.25nm (3sig)[1]
Optics
1.45nm with signal processing function.[1]
What is it?
What do the numbers mean?
Power & electrical5
Wafer handling2
Optics & imaging2
- Optical magnification (x100 & x200)[1]
Performance1
Dimensions & facilities1
- Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)[1]
Configuration & options9
- Ergonomics Modification[1]
- 3 FOUP[1]
- higher than CG4000 series[1]
- Signal Light Tower (with buzzer)[1]
- UL Safety Modification (S2-0200)[1]
- SPM (pre-focus only)[1]
- Multi-point Measurement[1]
- Image Filing Function[1]
- Output function to DOS format FD[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the CG 5000 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CG 5000 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CG 5000 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CG 5000 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CG 5000 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CG 5000 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Jul 29, 2026.
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