Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi CG 5000 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | CG 5000 CD-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Automatic Beam Alignment on wafer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi CG 5000 CD-SEM |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)[2] |
| Resolution | — | 1.45nm with signal processing function.[2] |
| Measurement repeatability | — | 0.25nm (3sig)[2] |
| Throughput | — | 50wph (20 measurements/wafer), approximately 40%[2] |
| Wafer size | — | Automatic Beam Alignment on wafer[2] |
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