Hitachi
4700
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi 4700 is a scanning electron microscope. The Hitachi S-4700 Field Emission Scanning Electron Microscope is used for detailed image analysis of devices and circuits fabricated in the NanoFab. The Hitachi S-4700 Field Emission Scanning Electron Microscope can magnify images up to 500kX.[1]
What it is
The Hitachi 4700 is a scanning electron microscope used in metrology and inspection work.[2]
The Hitachi 4700 is also used as a detailed image analysis tool for devices and circuits fabricated in a NanoFab.[1]
How it works
The Hitachi S-4700 FESEM includes energy dispersive x-ray analysis for elemental identification. The specimen stage tilts to 60 degrees and rotates continuously through 360 degrees, and the beam accelerating voltage is variable from 0.5-30 keV.[1]
Where it fits in the process flow
The Hitachi S-4700 FESEM is used for detailed image analysis of fabricated devices and circuits in the NanoFab. The instrument can accommodate a sample up to 100 mm in diameter.[1]
Applications
The Hitachi S-4700 FESEM is used to inspect devices and circuits fabricated in the NanoFab. The instrument can magnify images up to 500kX, resolve features down to 2nm under ideal conditions, and identify elemental materials with energy dispersive x-ray analysis.[1]
What do the numbers mean?
Power & electrical1
Optics & imaging2
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Accelerating voltage0.5-30 keV[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of microscope is the Hitachi 4700?
The Hitachi 4700 is a scanning electron microscope.[2]
What is the Hitachi 4700 used for in semiconductor work?
The Hitachi 4700 is used for detailed image analysis of devices and circuits fabricated in the NanoFab.[1]
What analytical capability is included on the Hitachi S-4700 FESEM?
The Hitachi S-4700 FESEM includes an energy dispersive x-ray analysis tool for elemental identification.[1]
What sample size can the stage accommodate?
The specimen stage can accommodate a sample up to 100 mm in diameter.[1]
Not publicly documented
The following facts about the 4700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4700 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4700 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4700 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4700 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4700 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [2]Equipment inventory listing
Last updated Oct 8, 2026.
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