Comparison ledger
Hitachi 4700, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 4700Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA 1.112 PSL Wafer |
| Specifications | ||
| Type | Scanning Electron Microscope (SEM)[1] | — |
| Model | 4700[1] | — |
| Maximum magnification | up to 500kX[2] | — |
| Resolution | down to 2nm[2] | — |
| Accelerating voltage | 0.5-30 keV[2] | — |
| Sample diameter | up to 100mm[2] | — |
| Stage tilt | up to 60 degrees[2] | — |
| Stage rotation | full 360 degrees continuous rotation[2] | — |
| Analysis tool | energy dispersive x-ray analysis tool[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[3] |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
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