Waferpedia

Blue M

SPX

Thermal / DiffusionBlue M SPX family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

SPX — Inventory photo
Fig. 01SPXInventory photo[1]

Power

9 kW[2]

Performance

+/- 1% of setpoint[2]

Optics

+/-0.1°C[2]

How it works

Blue M SPX ovens operate using mechanical forced-air convection. Airflow is generated by a direct-drive motor with a multi-blade centrifugal fan and is directed by baffles to ensure uniform thermal distribution across the chamber volume. The oven can be used under constant positive pressure and includes a gas purge and gas holding charge feature. An inert gas purge system eliminates moisture and vents contaminants; an adjustable inert gas flowmeter is provided. The gas delivery system introduces gas through the agitation fan shaft to ensure proper mixing and prevent air from being drawn into the chamber. The fan impeller is stainless steel to minimize contamination and maintain positive chamber pressure. A cooling facility with a stainless steel cooling coil speeds cooldown and allows near-ambient operation.[2][3]

Applications

Blue M SPX ovens are used in a variety of thermal processes that require inert or oxygen-reduced environments. Application areas include curing polyamide coatings, moisture drying, baking photoresist coatings, and various pharmaceutical and electronic processes. In semiconductor manufacturing, these ovens are employed for drying lithium-ion battery electrodes under nitrogen to prevent oxidation, thermal curing of epoxy composites, and precursor annealing. The ovens also serve in materials science research, catalyst activation, and pharmaceutical stability testing.[2][3]

What do the numbers mean?

Power & electrical1

Heating power
9 kW[2]
Accurate?

Optics & imaging1

Resolution
+/-0.1°C[2]
Accurate?

Performance2

Temperature uniformity
+/- 1% of setpoint[2]
Accurate?
Control accuracy
+/-0.5°C[2]
Accurate?

Dimensions & facilities1

External dimensions
1000 x 1250 x 2850 mm high[2]
Accurate?

Configuration & options3

Temperature range
ambient to 350°C[2]
Accurate?
Insulation
100 mm fiberglass insulation[2]
Accurate?
Door seal
Blue M silicone door seal[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Heating power9 kW[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the temperature uniformity specification?

The temperature uniformity is ±1% of setpoint.[2][3]

What safety features are included?

The oven includes an interlocked safety switch that disables heating and purging when the door is unlatched, ensuring atmosphere containment during access.[3]

What type of chamber construction is used?

The chamber is constructed with full-welded 304 stainless steel with zero penetrations into insulation layers, and the interior is removable and reinforced.[2][3]

Not publicly documented

The following facts about the SPX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SPX are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SPX are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SPX are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SPX are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SPX is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]michaelbenaltinc.com — michaelbenaltinc.commichaelbenaltinc.com
  3. [3]Blue M SPX Blue M 146 Inert Atmosphere Oven - InstrumentHive — instrumenthive.cominstrumenthive.com
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Last updated Oct 8, 2026.

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