Waferpedia

Comparison ledger

SPXversus1000 Hot Plate

Blue M SPX, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SPXBlue M
OEMBlue MCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M SPXCEE 1000 Hot Plate
Specifications
Temperature rangeambient to 350°C[1]—
Temperature uniformity+/- 1% of setpoint[1]—
Control accuracy+/-0.5°C[1]—
Resolution+/-0.1°C[1]—
Heating power9 kW[1]—
External dimensions1000 x 1250 x 2850 mm high[1]—
Insulation100 mm fiberglass insulation[1]—
Door sealBlue M silicone door seal[1]—
Configuration—4"[2]
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]michaelbenaltinc.commichaelbenaltinc.com
  2. [2]inventory listing