YES
1518SM
What it is
How it works
Where it fits in the process flow
The YES 1518SM provides above-listed Vapor Prime and Image Reversal capacities, or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers.[3][1]
The YES 1518SM has a throughput of 2 full loads per hour.[3][1]
Applications
The YES 1518SM is used for Vapor Prime, Image Reversal, and Silylation.[3][1]
The YES 1518SM uses HMDS at less than 7 ml per 200 wafers.[3][1]
- Vapor prime
- Image reversal
- Silylation
What do the numbers mean?
Wafer handling2
- Silylation capacity
- Above listed capacities for Vapor Prime and Image Reversal, or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers[1]2 sources
Performance1
Dimensions & facilities4
- Chamber dimensions
- 20-in (508mm) high, 20-in (508mm) wide, 15.12-in (384mm) deep[1]2 sources
Configuration & options4
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-58TASM | — | — | Provides vapor prime and image reversal capacities, or silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers. | web.archive.org[1] |
| YES-1518SM | — | — | Provides above-listed vapor prime and image reversal capacities, or silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers. | web.archive.org[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 1518SM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1518SM are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1518SM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1518SM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1518SM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1518SM are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]fabsurplus.comfabsurplus.com
- [3]1518SM — YES | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
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