Waferpedia

Yaskawa

XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot

Assembly / SMTYaskawa XU RC 350 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Yaskawa XU RC 350 D C 31+ERCR RS 09 A 003 is an atmospheric wafer robot. The Yaskawa XU RC 350 D C 31+ERCR RS 09 A 003 supports 12-inch wafer sizes. The Yaskawa XU RC 350 D C 31+ERCR RS 09 A 003 is compatible with DNS SU 3000.[1]

YaskawaXU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot
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What is it?

The Yaskawa XU RC 350 D C 31+ERCR RS 09 A 003 is an atmospheric wafer robot compatible with 12-inch wafers.

What do the numbers mean?

Wafer handling1

Wafer Sizes
12 inch[1]
Accurate?

Configuration & options6

Compatible with DNS SU 3000[1]
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Asset #
147939[1]
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Make
Yaskawa[1]
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Model
XU RC 350 D C 31+ERCR RS 09 A 003[1]
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Compatibility
DNS SU 3000[1]
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Environment
Atmospheric[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Yaskawa XU RC 350 D C 31+ERCR RS 09 A 003?

The Yaskawa XU RC 350 D C 31+ERCR RS 09 A 003 is an atmospheric wafer robot.[1]

What equipment is this robot compatible with?

The robot is compatible with DNS SU 3000.[1]

Who makes this robot?

The equipment is made by Yaskawa.[1]

Not publicly documented

The following facts about the XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XU RC 350 D C 31+ERCR RS 09 A 003 Atmospheric Wafer Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Oct 10, 2026.

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