Waferpedia

Veeco

Waferstorm 3300 M 3303 M 3304 Single Wafer Processing

Wet Processing / CleanVeeco Waferstorm family
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Waferstorm 3300 M 3303 M 3304 Single Wafer Processing — Inventory photo
Fig. 01Waferstorm 3300 M 3303 M 3304 Single Wafer ProcessingInventory photo[1]

What it is

The Veeco Waferstorm 3300 M 3303 M 3304 is a single wafer processing system for wet processing and cleaning.[2]

How it works

General reference — not yet source-verified

Single wafer wet processing tools handle one wafer at a time through controlled liquid chemical steps.

Single wafer cleaning tools are used to remove contaminants, residues, and process films from wafer surfaces with wet chemistries and rinse steps.

Where it fits in the process flow

The Waferstorm family sits in wet processing and clean applications within semiconductor manufacturing.[2][3]

Applications

The Waferstorm 3300 M 3303 M 3304 is used for wet processing and cleaning of semiconductor wafers.[2]

What do the numbers mean?

Power & electrical3

Voltage
208 VAC[2]
Accurate?
Phase
3 Phase[2]
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Frequency
60 Hz[2]
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Wafer handling4

Model
Waferstorm M 3303[1]
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Model designation
Waferstorm 3300 / M 3303 / M 3304[2]
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Equipment type
single wafer processing system[2]
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Wafer size
6 inch[1]
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Gas & chemistry1

Configured for
150mm SSEC/Veeco M3303 solvent (NMP) liftoff system[3]
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Configuration & options4

40 A[1]
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Manufacturer
Veeco / SSEC[1]
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Process category
Wet Processing / Clean[2]
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Current
40 A[1]
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208 VAC[2]
  • Phase3 Phase[2]
  • Frequency60 Hz[2]
  • Configured for150mm SSEC/Veeco M3303 solvent (NMP) liftoff system[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Veeco Waferstorm 3300 M 3303 M 3304?

The Veeco Waferstorm 3300 M 3303 M 3304 is single wafer processing equipment for wet processing and cleaning.[2]

What process area is the Waferstorm family placed in?

The Waferstorm family is placed in wet processing and clean applications.[2][3]

Not publicly documented

The following facts about the Waferstorm 3300 M 3303 M 3304 Single Wafer Processing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Waferstorm 3300 M 3303 M 3304 Single Wafer Processing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Waferstorm 3300 M 3303 M 3304 Single Wafer Processing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Waferstorm 3300 M 3303 M 3304 Single Wafer Processing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Waferstorm 3300 M 3303 M 3304 Single Wafer Processing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Waferstorm 3300 M 3303 M 3304 Single Wafer Processing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]wotol.com — wotol.comwotol.com
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Last updated Oct 5, 2026.

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