Waferpedia

Tool family

Veeco Waferstorm

VeecoWet Processing / Clean3 entries
LinkedIn X Email

Models in this family

  1. Waferstorm 3300 M 3303 M 3304 Single Wafer Processing

    Veeco / SSEC Waferstorm 3300 / M 3303 / M 3304 is a single wafer processing system for 6-inch wafers.

  2. WaferStorm 3303 Automated Solvent Processor

    Veeco WaferStorm 3303 is an automated solvent processor with a 300mm FOUP load port, wafer mapping and RFID reader, and robotic handling for 200/300mm wafers.

  3. Waferstorm M 3305 Lift Off

    The Veeco / SSEC Waferstorm M 3305 is a lift off machine.

    Cited variants

    DesignationGenerationVintageChangesSource
    300 Series——Stainless Steel with Mirror Finish, Windows 10 PC, SECS/GEM, additional featuresEquipment inventory listing[1]

All entries

  1. Waferstorm 3300 M 3303 M 3304 Single Wafer ProcessingVeeco

    Veeco / SSEC Waferstorm 3300 / M 3303 / M 3304 is a single wafer processing system for 6-inch wafers.

    CategoryWet Processing / Clean
    12 specs
  2. WaferStorm 3303 Automated Solvent ProcessorVeeco

    Veeco WaferStorm 3303 is an automated solvent processor with a 300mm FOUP load port, wafer mapping and RFID reader, and robotic handling for 200/300mm wafers.

    CategoryTest & ProbeWaferLoad port-TDK with wafer mapping and RFID reader
    20 specs
  3. Waferstorm M 3305 Lift OffVeeco

    The Veeco / SSEC Waferstorm M 3305 is a lift off machine.

    CategoryWet Processing / CleanWaferRobotic Wafer Handler:
    40 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing