Veeco

NT 9100

Q: What type of measurement does the NT 9100 provide?

The NT 9100 provides non-contact, three-dimensional topography and film thickness measurement.

Metrology & Inspection Veeco NT 9100 family

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NT 9100 — Inventory photo — Fig. 01NT 9100Inventory photo^[1]

Performance

0.8% accuracy; <0.1% at 1σ repeatability^[2]

Optics

<0.1 nm RMS^[2]

What it is

The Veeco NT 9100 is a non-contact optical profilometer used for surface metrology and inspection.^[1]^[3]

The NT 9100 is a tabletop surface profiler in the Wyko NT9100 optical profiling system family.^[2]^[3]

How it works

The NT 9100 uses non-contact three-dimensional topography measurement and film thickness measurement.^[2]

The NT 9100 uses dual-LED illumination and a motorized stage architecture for stitched measurements and automated positioning.^[2]

Where it fits in the process flow

The NT 9100 is used for research, low-volume production, process control, and monitoring.^[2]

Applications

The NT 9100 is applied to MEMS, thick films, optics, ceramics, and advanced materials research.^[2]^[4]

The NT 9100 supports optical profiles and surface analysis.^[4]

What do the numbers mean?

Optics & imaging9

Vertical resolution: <0.1 nm RMS^[2]
Objectives: 1.5X, 2.5X, 5X, 10X, 20X, 50X; long working distance objectives available; optional motorized turret; optional through transmissive media objectives^[2]
Measurement array: 640 x 480, non-interlaced; optional 1392 x 1040 camera^[2]
Optical assembly: Dual LED illuminator; three-position FOV turret; closed-loop; 10 mm scan^[2]
Lateral spatial sampling: 0.1 to 13.2 μm (≤160 nm with high resolution camera)^[2]
Optical resolution: 0.49 μm min.^[2]
Field of view: 7.68 x 5.76 mm max, 0.06 x 0.05 mm min with standard-resolution camera; 7.84 x 5.87 mm max, 0.09 x 0.07 mm min with high-res camera^[2]
Field-of-View: 7.68 x 5.76mm max, 0.06 x 0.05mm min with standard-resolution camera; 7.84 x 5.87mm max, 0.09 x 0.07min with high-resolution camera^[2]
Objectives: 1.5X, 2.5X, 5X, 10X, 20X, 50X for magnifications from 0.75X to 100X; Long working distance objectives available; Optional motorized turret; Optional Through Transmissive Media objectives^[2]

Performance3

Step height: 0.8% accuracy; <0.1% at 1σ repeatability^[2]
Repeatability: 0.05nm^[2]
Step Height Accuracy: 0.8% accuracy; <0.1% at 1σ repeatability^[2]

Control & software1

Computer System: Latest Dell with 24/7 support line; Software Vision running under Microsoft Windows XP Professional^[2]

Dimensions & facilities3

Measurement capability: Non-contact, three-dimensional, topography and film thickness^[2]
Profiler footprint: 320 mm W x 510 mm D x 645 mm H; 70 kg^[2]
Footprint: 320mm W x 510mm D x 645mm H; 70kg (excluding peripheral electronics and air table)^[2]

Configuration & options8

Type: Profilometer^[1]
Field-of-view multipliers: 0.55X, 0.75X, 1X, 1.5X, 2X^[2]
Light source: Long-lifetime green and white LEDs^[2]
Stages: Automated 100 mm Z-axis; ±6° tip/tilt stage; 100 mm XY manual stage standard; 150 mm XY auto stage optional^[2]
Vertical scan speed: User-selectable up to 24 μm/sec^[2]
Reflectivity: <1 to 100%^[2]
Certification: CE, NRTL^[2]
Vertical Measurement Range: 0.1nm to 10mm^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
NT9100	—	—	Base model listed in Waferpedia family entry.	waferpedia.com^[3]

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Frequently asked questions

What type of measurement does the NT 9100 provide?

The NT 9100 provides non-contact, three-dimensional topography and film thickness measurement.^[2]

Not publicly documented

The following facts about the NT 9100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NT 9100 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NT 9100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NT 9100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NT 9100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NT 9100 are on record.
Answerable by: an OEM parts catalog or a service engineer