Varian

HS 20 Diffusion

Thermal / Diffusion Varian HS 20 Diffusion family

Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

HS 20 Diffusion — Inventory photo — Fig. 01HS 20 DiffusionInventory photo^[1]

What it is

The Varian HS 20 is a diffusion pump in the HS series of high-throughput vacuum pumps. The HS 20 is used as a vacuum pump in systems that require high vacuum.^[2]^[5]^[4]

How it works

A diffusion pump moves gas by using heated pump fluid to generate a high-speed vapor jet that entrains gas molecules and directs them toward the foreline. The pump operates with cooling water and pump fluid, and its safe operation depends on continuous evacuation and proper temperature control.^[2]^[3]

Applications

The HS 20 is used in vacuum systems for semiconductor manufacturing and other industrial vacuum applications that need high vacuum pumping.^[1]^[4]^[5]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Santovac 5 diffusion pump fluid is not recommended for the HS-20.

What do the numbers mean?

Vacuum & pumping4

Type: Diffusion pump^[2]
Pumping speed, maximum, air: 17,500 l/s^[3]
Pumping speed, maximum, helium: 22,000 l/s^[3]
Foreline flange: ISO63-K^[4]

Dimensions & facilities1

Weight: 264 kg^[4]

Configuration & options5

Model: HS 20^[1]
Cooling method: Water-cooled^[2]
Inlet flange: 20" ASA^[4]
Power: 480 VAC, 3-Ø^[4]
Oil capacity: 4.70 liters^[4]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

TypeDiffusion pump^[2]
Pumping speed, maximum, air17,500 l/s^[3]
Pumping speed, maximum, helium22,000 l/s^[3]
Foreline flangeISO63-K^[4]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of pump is the Varian HS 20?

The Varian HS 20 is a diffusion pump.^[2]^[5]

Not publicly documented

The following facts about the HS 20 Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HS 20 Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HS 20 Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HS 20 Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the HS 20 Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the HS 20 Diffusion are on record.
Answerable by: an OEM parts catalog or a service engineer