Thermo Fisher
Scientific FEI Helios NanoLab 600 FIB-SEM
The Thermo Fisher Scientific / FEI Helios NanoLab 600 is a FIB-SEM (Focused Ion Beam - Scanning Electron Microscope). The Helios NanoLab 600 achieves a resolution of 0.9 nm at 15 kV and 1.4 nm at 15 kV with an optional working distance. The Helios NanoLab 600 uses a Schottky field emitter and a gallium liquid metal ion source.[1][2]
What it is
The Thermo Fisher Scientific FEI Helios NanoLab 600 is a focused ion beam and scanning electron microscope used in metrology and inspection.[1][2]
The Helios NanoLab 600 combines an electron column with an ion column in one instrument.[1][2]
How it works
Where it fits in the process flow
General reference — not yet source-verifiedA focused ion beam and scanning electron microscope sits in the metrology and inspection flow for sample review, site-specific cross-sectioning, and nanoscale analysis.
Applications
What do the numbers mean?
Optics & imaging20
- Electron Column[1]
- ION Column[1]
- Resolution:[1]
- 0.9 nm at 15 kV[1]
- 1.4 nm at 15 kV[1]
- 1 nm at 15 kV[1]
- 1.6 nm at 5 kV[1]
- 2.5 nm at kV[1]
- 5 nm at 30 kV[1]
- Resolution (Optional WD) - 15 kV
- 0.9 nm @ 15 kV (optional WD), 1.4 nm @ 15 kV (optional WD)[1]
Control & software1
Configuration & options17
- Schottky FE mounted on the NG hot swap gun module[1]
- Gallium Liquid Metal[1]
- 1000 h[1]
- ELSTAR[1]
- Sidewinder[1]
- Optional WD[1]
- Coincident WD:[1]
- X/Y = 150mm[1]
- Z = 0-20mm[1]
- Beam - Schottky FE mounted on NG hot swap gun module
- Schottky field emitter on NG hot swap gun module[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Scientific FEI Helios NanoLab 600 FIB-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Helios NanoLab 600 FIB-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Helios NanoLab 600 FIB-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Helios NanoLab 600 FIB-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Helios NanoLab 600 FIB-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Helios NanoLab 600 FIB-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Scientific FEI Helios NanoLab 600 FIB-SEM — Thermo Fisher | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
Last updated Oct 10, 2026.
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