Tegal
i90X
The Tegal i90X is a plasma etch system built on the production-proven Tegal 900-series platform. The Tegal i90X provides unlimited recipes and 20X fine set-point control for pressure, RF and gas flows. The Tegal i90X runs its industrial integrated PC/touchscreen interface on Windows NT.[1]
Optics
high-resolution stepper motors[1]
Control era
Windows NT
What it is
General reference — not yet source-verifiedPlasma etch systems remove material from a semiconductor wafer using ionized gas species. The process typically involves generating a plasma by applying radio-frequency power to a low-pressure gas, creating reactive ions and radicals that etch the desired film.
How it works
General reference — not yet source-verifiedIn a typical plasma etch process, the wafer is placed in a vacuum chamber. Process gases are introduced and ignited into a plasma by an RF field. Ions from the plasma bombard the wafer surface, etching the exposed material. The endpoint of the etch can be monitored optically or by analyzing the chemistry of the exhaust.
Where it fits in the process flow
General reference — not yet source-verifiedIn semiconductor fabrication, the etch step follows photolithography, where a patterned photoresist mask protects certain areas of the wafer. The etch system removes the underlying material from regions not covered by the mask. After etching, the photoresist is stripped away. Etching can be used for layers such as oxide, nitride, polysilicon, or metals.
What can it run?
Process applications and technology nodes documented for this tool.
- silicon
- telecom
What do the numbers mean?
Power & electrical3
Wafer handling3
Optics & imaging1
Control & software6
- Control system
- programmed logic controller (PLC) for input/output speed and expansion; interface board connects to all existing sensors for troubleshooting and maintenance[1]
- I/O control
- Programmable logic controller (PLC) for I/O speed and expansion; interface board connects to all existing sensors[1]
Dimensions & facilities1
Configuration & options11
- Data logging
- default or user-defined values and polling rates; downloadable files to disk or CD; on-screen real time and historical trending; unlimited access to every system I/O data point; additional I/O available for expansion[1]
- Process steps
- Configurable, faster stabilization step; programmable percent overetch step[1]
- Data logging
- Default or user-defined values and polling rates; downloadable files to disk or CD; on-screen real-time and historical trending; unlimited access to every system I/O data point[1]
Vintage & configurations
Control-system eraWindows NT[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Set-point control20X fine set-point control for pressure, RF and gas flows[1]
- Control computerWindows NT, Pentium II 130MB RAM, 230 MHz clock, 6GB hard drive available[1]
- Control computerWindows NT, Pentium II, 130MB RAM, 230 MHz clock, 6GB hard drive, integrated PC/touchscreen, read-write CD, 3.5 floppy disk[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the platform basis of the Tegal i90X?
The i90X is based on the production-proven platform of the Tegal 900 series.[1]
What control system does the i90X use?
The i90X uses a personal computer running Windows NT on a Pentium II processor with 130 MB RAM and a 230 MHz clock, combined with a programmable logic controller for input/output.[1]
What display and interface features does the i90X offer?
The i90X has a graphic user interface touch screen, on-screen end-point trace and I/O screen readout, on-screen alarm logging, and real-time and historical trending.[1]
Not publicly documented
The following facts about the i90X are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the i90X are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the i90X are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the i90X are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the i90X is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the i90X are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Sep 22, 2026.
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