Tegal
The Tegal 900ACS is a single-wafer cassette-to-cassette non-critical plasma etch system. The Tegal 900ACS processes 75mm to 200mm wafers. The Tegal 900ACS is part of the ACS series.[1][2][3]
Wafer size
75mm to 200mm wafers
Performance
faster throughput[1]
The Tegal 900ACS is a single-wafer cassette-to-cassette non-critical plasma etch system.[1][2][3]
The Tegal 900ACS is designed for processing wafers with diameters from 75mm to 200mm.[1][2][3]
The Tegal 900ACS belongs to the ACS series of non-critical plasma etch tools.[1]
A variant of the Tegal 900ACS is the Tegal 980ACS, which is part of the same series.[1][3]
The Tegal 900ACS is used for non-critical etch steps in semiconductor manufacturing, typically after photoresist patterning and before subsequent deposition or cleaning steps.
The Tegal 900ACS processes wafers that have already undergone lithography and development, removing material that is not protected by photoresist.
The Tegal 900ACS is employed for etching dielectric layers, passivation layers, and pad openings in legacy and mature-node device fabrication.
The Tegal 900ACS is suitable for non-critical plasma etch processes in the production of silicon devices, MEMS, and other semiconductor components.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 980ACS | — | — | — | web.archive.org[1] |
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The Tegal 900ACS supports wafers with diameters from 75mm to 200mm.[1][2][3]
The Tegal 900ACS performs non-critical plasma etching.[1][2][3]
The following facts about the 900ACS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 900ACS are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 900ACS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 900ACS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 900ACS is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 900ACS are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 9, 2026.
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