Comparison ledger
Tegal 1511e, Tegal 900ACS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1511eTegal | 900ACSTegal |
|---|---|---|
| OEM | Tegal | Tegal |
| Category | Etch | Etch |
| Wafer size | three- to six-inch wafers | 75mm to 200mm wafers |
| Process node | — | — |
| Introduced | 1984 | — |
| Production run | 1984– | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1511e | Tegal 900ACS |
| Cited variants | — |
|
| Specifications | ||
| tool type | tri-electrode dual-frequency plasma etch system[2] | single wafer cassette-to-cassette etch system[1] |
| wafer size | three- to six-inch wafers[2] | — |
| first sold | 1984[2] | — |
| system characteristic | first vacuum-loadlocked dual-frequency tri-electrode etch system[2] | — |
| First vacuum-loadlocked dual-frequency tri-electrode etch system | Yes[2] | — |
| process type | — | non-critical plasma etch[1] |
| wafer range | — | 75mm to 200mm wafers[1] |
| series | — | ACS series[1] |
| features | — | faster throughput, faster system calibration, touchscreen graphical user interface, integrated data logging, and factory automation support[1] |
| throughput | — | faster throughput[1] |
| system calibration | — | faster system calibration[1] |
| user interface | — | touchscreen graphical user interface[1] |
| data logging | — | integrated data logging[1] |
| automation support | — | factory automation support[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →