SVG
Thermco 5204 Diffusion
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SVG Thermco 5204 Diffusion Furnace is a thermal diffusion system for 150 mm (6 inch) wafers. The Thermco 5204 has a 40 inch flat zone.[1][2]
What it is
The SVG Thermco 5204 is a diffusion furnace used in semiconductor manufacturing. The model is built at the Thermco Orange County factory with the TMX control system, the most standard control system for all furnace systems. The system handles one hundred fifty millimeter wafers and provides a forty inch flat zone.[2]
How it works
The SVG Thermco 5204 diffusion furnace includes a load station approximately ten feet long and a source cabinet of standard heroe design. One bank has a stand-alone TMX cabinet (like a Thermco) and the other three banks have modified tube drawers designed into the load station base on slides.[2]
What do the numbers mean?
Wafer handling2
Control & software1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Thermco 5204 Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Thermco 5204 Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Thermco 5204 Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Thermco 5204 Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Thermco 5204 Diffusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Thermco 5204 Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
Last updated Sep 24, 2026.
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