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Onto Innovation

NSX 95

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

NSX 95 AVI是一种自动视觉检查(AVI)系统,由ONTO / Rudolph / August制造。NSX 95 AVI采用200-240 VAC、50/60 Hz单相电源,满载电流6 A。[1][2][3]

NSX 95 — Inventory photo
Fig. 01NSX 95Inventory photo[4]

What it is

The Onto Innovation NSX 95 is an AVI system for auto visual inspection.[1][2][3]

How it works

General reference — not yet source-verified

An auto visual inspection system in semiconductor manufacturing is used to inspect surfaces and structures by combining optical viewing with automated decision logic.

A machine in this class is placed so that wafers, panels, or other process parts can be examined for visible defects, pattern issues, or surface anomalies after a fabrication step.

Where it fits in the process flow

General reference — not yet source-verified

An auto visual inspection system is used in the inspection and metrology portion of the fab flow, where it supports quality control between process steps.

Applications

General reference — not yet source-verified

An auto visual inspection system is used for defect review and surface inspection in semiconductor manufacturing.

A machine in this class can support inspection of patterned substrates and other production surfaces where visible anomalies must be detected.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Robot Controller Removed

What do the numbers mean?

Power & electrical2

Power
200-240 VAC, 50/60 Hz[1]
Accurate?
Phase
Single phase[1]
Accurate?

Wafer handling1

Robot Controller Removed[2]
Accurate?

Configuration & options7

Full load current
6 A[1]
Accurate?
Largest load
1.5 A[1]
Accurate?
Main breaker
10 A[2]
Accurate?
Full Load
6 A[1]
Accurate?
Power
200-240 VAC[2]
Accurate?
Function
AVI (Auto Visual Inspection)[1]
Accurate?
Vintage
2006 Vintage[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power200-240 VAC, 50/60 Hz[1]
  • PhaseSingle phase[1]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • ONTO / Rudolph / August NSX 95 Power SupplyIn Productionsource[5]
  • ONTO / Rudolph / August NSX 95 Power SupplyIn Productionsource[6]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What power supply does the NSX 95 require?

The NSX 95 requires a 200-240 VAC, 50/60 Hz single-phase power supply.[1][2]

What is the full load current of the NSX 95?

The full load current is 6 A.[1]

What is the largest load current of the NSX 95?

The largest load current is 1.5 A.[1]

What is the main breaker rating of the NSX 95?

The main breaker rating is 10 A.[2]

Not publicly documented

The following facts about the NSX 95 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 95 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSX 95 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSX 95 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the NSX 95 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the NSX 95 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
  4. [4]Inventory photo
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
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Last updated Oct 9, 2026.

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