MKS
The MKS Vision 2000-C is a residual gas analyzer (RGA) designed for use in semiconductor fabrication processes, specifically chemical vapor deposition (CVD) and atomic layer deposition (ALD).[1]
The Vision 2000-C is one of a family of Vision series RGAs that also includes the Vision 2000-A and Vision 2000-E models.[1]
The Vision 2000-C provides continuous in situ monitoring of the process chamber atmosphere.[1]
The instrument supports baseline monitoring to detect air leaks and background contamination within the vacuum system.[1]
The Vision 2000-C includes a Remote Vacuum Controller (RVC) for failsafe vacuum operation.[1]
The device has a minimum detectable partial pressure of less than 2.7 × 10⁻⁹ Pa (less than 2 × 10⁻¹¹ Torr).[1]
The Vision 2000-C is intended for CVD and ALD processes, which are used to deposit thin films on wafers under low-pressure conditions.[1]
The MKS Vision 2000-C is applied to multi-pressure, CVD, and ALD processes within semiconductor manufacturing.[1]
The RGA is used for continuous in situ monitoring of the process environment, enabling detection of air leaks and background contamination.[1]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Vision 2000-E™ | — | — | Grouped with Vision 2000-C in the same product description; listed as having identical specifications for multi-pressure, CVD & ALD processes | api.p1.mks.com[1] |
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The following facts about the Vision 2000-C™ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Vision 2000-C™ are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Vision 2000-C™ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Vision 2000-C™ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Vision 2000-C™ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Vision 2000-C™ are on record.
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Last updated Sep 22, 2026.