Tool family
The MKS Vision 2000-C™ is a residual gas analyzer for multi-pressure, CVD, and ALD processes that provides continuous in situ monitoring with a minimum detectable partial pressure below 2.7e-9 Pa.
The MKS Vision 2000-C™ is a residual gas analyzer for multi-pressure, CVD, and ALD processes that provides continuous in situ monitoring with a minimum detectable partial pressure below 2.7e-9 Pa.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Vision 2000-E™ | — | — | Grouped with Vision 2000-C in the same product description; listed as having identical specifications for multi-pressure, CVD & ALD processes | api.p1.mks.com[1] |