MKS
AX 8406 A Ozone
The MKS AX 8406 A is an ozone generator. The MKS AX 8406 A is rated for 50/60 Hz, 208V, 3 phase, 20A.[1][2]
What it is
How it works
General reference — not yet source-verifiedOzone generators of this class typically generate ozone by passing oxygen or dry air through a high-voltage corona discharge, converting molecular oxygen into ozone. The resulting ozone-enriched gas is then delivered to a wet processing tool or chamber where it reacts with wafer surfaces. Some designs use ultraviolet light as an alternative generation method, but corona discharge is the more common industrial approach.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the MKS AX 8406 A?
The MKS AX 8406 A is an ozone generator.[1]
Not publicly documented
The following facts about the AX 8406 A Ozone are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AX 8406 A Ozone are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AX 8406 A Ozone are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AX 8406 A Ozone are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AX 8406 A Ozone are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AX 8406 A Ozone is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]AX 8406 A Ozone — MKS | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 9, 2026.
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